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Refine the reaction of the plasma with the surface of the object

Author: Shenzhen three and wave of Electrical and Mechanical Technology Co。, LtdIssuing Time:2017-08-03 09:07:54Pageviews:955smallmediumbig

In the plasma, in addition to gas molecules, ions and electrons, there are also energy-excited state of the neutral atoms or atoms (also into free radicals), and the plasma emitted light, which wave length, energy level In the plasma and the material surface interaction has an important role.
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In the plasma, in addition to gas molecules, ions and electrons, there are also energy-excited state of the neutral atoms or atoms (also into free radicals), and the plasma emitted light, which wave length, energy level In the plasma and the material surface interaction has an important role.

Atomic groups and other free radicals and the surface of the reaction
Because these radicals are electrically heavy, there is a long life, and the number of ions in the ion is more than ions, so free radicals play an important role in the plasma, the role of free radicals mainly in the chemical reaction process of energy transfer "Activation", the free radicals in the excited state have a higher energy, so easy to form a new free radical when combined with the surface molecules of the object, the newly formed free radicals are also in the unstable high-energy state, it is likely to break down Reaction, into smaller molecules at the same time generate new free radicals, this reaction process may also continue, and finally broken down into water, carbon dioxide and the like simple molecules。 In other cases, free radicals combine with the surface molecules of the object, and a large amount of binding energy is released, which in turn acts as a driving force for initiating new surface reactions, causing the chemical reaction on the surface of the object to be removed.

The role of electrons and objects on the surface
On the one hand, the impact of electrons on the surface of the object can promote the decomposition and desorption of the gas molecules adsorbed on the surface of the object. On the other hand, a large number of electrons are favorable to cause chemical reactions. Because the electron mass is extremely small, it is much faster than the moving speed of the ions. When the plasma is treated, the electrons reach the surface of the object earlier than the ions, and the surface is negatively charged, which is conducive to further reaction.

The role of ions and the surface of the object
Usually refers to the role of positively charged cations, cations have a tendency to accelerate toward the negatively charged surface, at this time to obtain a considerable kinetic energy on the surface of the object, enough to impact to remove the surface attached to the particulate matter, we in this Phenomenon known as the sputtering phenomenon, and by the impact of ions can greatly promote the surface of the chemical reaction of the probability of occurrence.
 
The reaction of UV with the surface of the object
UV has a strong light energy, can be attached to the surface of the material molecules in the molecular bond fracture and decomposition, and ultraviolet radiation has a strong ability to penetrate the surface of the object through the depth of several microns and the role. In summary, we can see that plasma cleaning is the use of plasma within a variety of high-energy substances and activation, will be attached to the surface of the dirt completely removed stripping。
2017-08-03 955People browse

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Shenzhen three and wave of Electrical and Mechanical Technology Co., Ltd
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